Title: | Integration of functional complex oxide nanomaterials on silicon
|
Author: | Vila-Fungueiriño, José M.
Bachelet, Romain
Saint-Girons, Guillaume
Gendry, Michael
Gich, Marti
Gazquez, Jaume
Ferain, Etienne
Rivadulla, Francisco
Rodríguez-Carvajal, Juan
Mestres, Narcis
Carretero-Genevrier, Adrián
|
Affiliation: | Universidade de Santiago de Compostela. Centro de Investigación en Química Biolóxica e Materiais Moleculares Universidade de Santiago de Compostela. Departamento de Química Física
|
Subject: | Epitaxial growth | Silicon | Solution chemistry | Quartz | |
Date of Issue: | 2015-06-09
|
Publisher: | Frontiers Media
|
Citation: | Vila-Fungueiriño JM, Bachelet R, Saint-Girons G, Gendry M, Gich M, Gazquez J, Ferain E, Rivadulla F, Rodriguez-Carvajal J, Mestres N and Carretero-Genevrier A (2015) Integration of functional complex oxide nanomaterials on silicon. Front. Phys. 3:38. doi: 10.3389/fphy.2015.00038
|
Abstract: | The combination of standard wafer-scale semiconductor processing with the properties of functional oxides opens up to innovative and more efficient devices with high value applications which can be produced at large scale. This review uncovers the main strategies that are successfully used to monolithically integrate functional complex oxide thin films and nanostructures on silicon: the chemical solution deposition approach (CSD) and the advanced physical vapor deposition techniques such as oxide molecular beam epitaxy (MBE). Special emphasis will be placed on complex oxide nanostructures epitaxially grown on silicon using the combination of CSD and MBE. Several examples will be presented, with a particular stress on the control of interfaces and crystallization mechanisms on epitaxial perovskite oxide thin films, nanostructured quartz thin films, and octahedral molecular sieve nanowires. This review enlightens on the potential of complex oxide nanostructures and the combination of both chemical and physical elaboration techniques for novel oxide-based integrated devices |
Publisher version: | https://doi.org/10.3389/fphy.2015.00038 |
URI: | http://hdl.handle.net/10347/17007
|
DOI: | 10.3389/fphy.2015.00038 |
E-ISSN: | 2296-424X
|
Rights: | © 2015 Vila-Fungueiriño, Bachelet, Saint-Girons, Gendry, Gich, Gazquez, Ferain, Rivadulla, Rodriguez-Carvajal, Mestres and Carretero-Genevrier. This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) or licensor are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms Atribución 4.0 Internacional
|